About: http://webisa.webdatacommons.org/3120142

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	During process runs, parameters such as feed rate, oxide removal, etching rate, and secondary waste generation were determined.
http://www.w3.org/ns/prov#wasQuotedFrom	osti.gov