About: http://webisa.webdatacommons.org/312094353

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	as shown in FIG. 1A, a wafer 110 or other substrate, such as silicon substrate or glass substrate, is provided.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com