About: http://webisa.webdatacommons.org/312109971

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	(a) a glass substrate sub0 is cleaned to remove organic substance, metals, fine particles and other impurities.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com