About: http://webisa.webdatacommons.org/312147064

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Atomic layer deposition is a deposition technique that uses thin film that is based on sequential use in gas phase process.
http://www.w3.org/ns/prov#wasQuotedFrom	alliedmarketresearch.com