| http://www.w3.org/ns/prov#value | - The polishing surface may be made of a commonly available polymeric CMP pad materials (such as those provided by companies such as Rodel) or a fixed abrasive layers such as the polishing pads provided by 3M. As described above, the belt pad may be made of more than one layer and/or the polishing surface may be disposed on a compressible layer.
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