About: http://webisa.webdatacommons.org/312845073

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The dielectric layer 515 can be a material such as silicon nitride, silicon oxy-nitride, silicon carbide, silicon oxy-carbide, silicon fluorine, silicon oxy-fluorine and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr