About: http://webisa.webdatacommons.org/312856236

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The trenches could, optionally, be filled with an insulator, such as SiOx or SiN, to provide a more planar surface on which the electrical interconnect 418 and/or 420 is provided.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com