About: http://webisa.webdatacommons.org/312887501

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The passivation material can be deposited by CVD, such as PECVD, MOCVD or ICP or by evaporation.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com