About: http://webisa.webdatacommons.org/313005419

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The distribution of impurity atoms within a doping region is determined by conditions such as the mass of injected ion, the injection energy and the temperature of heat treatment.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com