About: http://webisa.webdatacommons.org/313006365

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thus, there is a problem in making shallow doped regions such as shallow source-drain junctions.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es