About: http://webisa.webdatacommons.org/313079982

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, aspects of the present invention remedy these deficiencies and allow manufacturers to produce features, such as metal lines, with previously unachievable feature sizes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com