About: http://webisa.webdatacommons.org/313313740

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The following table is an example of etching a deep, narrow, high aspect ratio deep trench with smooth sidewalls by using the method and gas compositions of the present invention:
http://www.w3.org/ns/prov#wasQuotedFrom	google.com