About: http://webisa.webdatacommons.org/313356498

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The invention relates to apparatus and methods of rinsing and drying silicon wafers or other wafers or thin disc-like substrates or elements in the semiconductor process industry.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es