About: http://webisa.webdatacommons.org/313459470

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The object to be coated includes, for example, substrates such as a silicon wafer, and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com