| http://www.w3.org/ns/prov#value | - m composed of a material such as polyimide, acrylic, polyamide, polyimideamide or BCB (benzocyclobutene). [0134] After this, a contact hole was formed reaching the source region or the drain region of each TFT, and source wirings 158 to 161 and drain wirings 162 to 165 were formed.
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