About: http://webisa.webdatacommons.org/313506509

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Embodiments of the present invention are particularly applicable to tools that have a high throughput of wafer pods.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com