About: http://webisa.webdatacommons.org/313651656

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As described in the foregoing article, a material suitable as such a electrostatic chuck includes ceramics composed mainly of alumina (Al2O3), aluminum nitride (AlN), boron nitride (BN), etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com