PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Using polishing techniques such as chemical-mechanical polishing (CMP), the metal that covers the top layer of the structure is removed, thereafter the PPMSO layer is also removed by CMP. Such polishing planarizes the metallization leaving only material in the via area 310.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com