About: http://webisa.webdatacommons.org/313740007

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Uniform heating, in fact, is a major challenge in making rapid wafer heating a production tool . . .
http://www.w3.org/ns/prov#wasQuotedFrom	google.es