| http://www.w3.org/ns/prov#value | - In particular, form grooves of depth 0.7 ??m and width 0.35 ??m in dielectric 302, and then implant Mg ions of dose 105 atoms/cm2 at a low energy such as 5-20 KeV in each of the four tilt dirctions plus also implant with zero tilt to cover the bottom of the grooves.
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