About: http://webisa.webdatacommons.org/31386936

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	vacuum deposition such as sputtering, electron beam, thermal evaporation, or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com