About: http://webisa.webdatacommons.org/313961885

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Under this condition, the growing chamber 100 is a space in which a semiconductor hetero film grows.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com