About: http://webisa.webdatacommons.org/313974459

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Initially, the coating solution of the present invention is applied to a substrate such as a silicon wafer or a glass plate using a spinner or a coater to form a photosensitive layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com