About: http://webisa.webdatacommons.org/314072171

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the production process of the semiconductor device, the metal substrate 1 is used as a base material, thus, deformation such as distortion does not occur in the production process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com