About: http://webisa.webdatacommons.org/314080676

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In a typical CVD process, a vacuum pump is connected to a reaction chamber, the silicon wafer or other substrate is positioned in the chamber, and the chamber is evacuated and heated.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com