About: http://webisa.webdatacommons.org/314335471

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this study, thermoelectric Bi-Te thin films, deposited on various substrates such as SiO2 wafers, glass, and sapphire, were fabricated by RF magnetron co-sputtering.
http://www.w3.org/ns/prov#wasQuotedFrom	science.gov