About: http://webisa.webdatacommons.org/314482310

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In a second aspect, the present invention is a method of making a semiconductor structure, comprising cleaning a gate stack comprising a metallic layer with a solution.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com