About: http://webisa.webdatacommons.org/314518488

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the etching treatment, the Cx1Fy1 gas is a gas with a high etching rate, and the etching rate thereof increases in the order of C4F6, C5F8, C4F8, C3F8, C2F6 and CF4.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com