About: http://webisa.webdatacommons.org/314582575

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In their manufacture, some form of laser ablation is preferred, but the compounds can also be made by techniques such as sputtering, MOCVD, MBE, evaporation, and so on.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com