About: http://webisa.webdatacommons.org/314743456

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	the wafer 15 with uniform deposition on the wafer and purging without deposition other than on the wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com