PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Insulative material 38 preferably constitutes an oxide material such as SiO2 which is chemical vapor deposited to a degree sufficient to fill in the empty troughs 29 from which conductive material was previously removed and to cover conductive material 32 which was not removed.
http://www.w3.org/ns/prov#wasQuotedFrom
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