About: http://webisa.webdatacommons.org/314979334

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In so doing, a lower insulating layer 176 a is first formed of an insulating material such as BPSG, after which a contact opening is etched and filled with a conducting material such as aluminum.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com