About: http://webisa.webdatacommons.org/315065600

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	20090289303METHOD AND APPARATUS FOR FABRICATING AN ULTRA THIN SILICON ON INSULATOR - In one embodiment, the invention is a method and apparatus for fabricating an ultra thin silicon on insulator.
http://www.w3.org/ns/prov#wasQuotedFrom	faqs.org