PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Insulator spacers 14 may be formed by forming an insulator layer such as silicon oxide or silicon nitride, to a thickness between about 300 and about 1000 Angstroms via LPCVD or PECVD procedures.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com