About: http://webisa.webdatacommons.org/315195787

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Indeed, companies such as Applied Materials, Aviza, and Lam have introduced tools designed for TSV applications.
http://www.w3.org/ns/prov#wasQuotedFrom	electroiq.com