About: http://webisa.webdatacommons.org/315217900

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this process, the aluminum layer 3a is left except a part removed in the selective etching shown in FIG. 10C.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com