About: http://webisa.webdatacommons.org/315275478

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Metal oxides such as nickel oxide may be difficult to etch using conventional techniques (e.g., sputter etching).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com