About: http://webisa.webdatacommons.org/315294150

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Second dielectric layer 19 is formed from a dielectric material such as silicon, silicon nitride, silicon oxide, or silicon dioxide and control gate region 21 is preferably formedfrom polysilicon.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com