About: http://webisa.webdatacommons.org/315400737

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Neighboring or first and second active area lines are separated and electrically isolated from each other by isolation trenches which are filled with an isolating material such as silicon dioxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com