About: http://webisa.webdatacommons.org/316655568

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Stress inducing spacer material adjacent selected sides of the gate region imparts stress, i.e. tension or compression, to at least the channel region of the substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com