About: http://webisa.webdatacommons.org/31667533

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Accordingly, in one embodiment, the present invention is a method of manufacturing a semiconductor device comprising the steps of providing a substrate, and forming a via through a top-side of the substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com