| http://www.w3.org/ns/prov#value | - In this figure, the first electrode 11 is formed of a third electrode layer 35 made of a metal such as aluminum or titanium or a metal material including both the metal and nitrogen by the concentration of the stoichiometric composition ratio or less and formed of a fourth electrode layer 32 made of a conductive oxide material including silicon oxide by the density from 1 to 15 atomic %.
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