About: http://webisa.webdatacommons.org/317016940

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In step 902, the ILD layer is deposited on the front-side surface over the through vias, where the ILD layer is made from a material such as silicon dioxide, silicon nitride, silicon carbide, silicon oxynitride, or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es