About: http://webisa.webdatacommons.org/317025820

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In FIG. 8A, an inorganic material, for example silicon nitride (SiNX), is deposited using a sputtering process, for example, to form an over-coating layer 270 disposed on the substrate 150 to cover the passivation layer 160.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com