| http://www.w3.org/ns/prov#value | - In contrast, if the measured distribution and/or size distribution of the polishing particles is smaller than the set value, the control routine proceeds from step S24 to step S25, in which the valve controller 60 outputs a control signal to each of the flow rate control valves 132 and 232 in such a manner as to reduce the distribution and/or size distribution of the polishing particles.
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