About: http://webisa.webdatacommons.org/317159145

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this figure, a substrate 1 such as a semiconductor substrate which is to be ion-implantated is disposed on the wall of a vacuum chamber 2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com