About: http://webisa.webdatacommons.org/317183465

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A noble gas, such as helium or argon, was flown into the chamber at a rate of about 100 to 2000 sccm, more preferably about 200 to 1000 sccm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es