PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • In general, all layers can be formed by conventional thin film deposition processes, such as, for example, evaporation, sputtering, chemical vapor deposition, pulsed laser deposition, thermal oxidation, and other techniques.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com