About: http://webisa.webdatacommons.org/317203520

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Interlayer dielectrics are commonly used in semiconductor devices, and may be made from such materials as silicon dioxide, PSG (Phospho-Silicate Glass), BPSG (Boron-Doped PSG), TEOS (tetraethyl-ortho-silicate), and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr