| http://www.w3.org/ns/prov#value | - Although the silicon nitride film is the most suitable insulating film for blocking the outflow of glass constituents, since its stress is strong, it has been unsuitable for a primer film of a TFT. However, in the present invention, since the silicon nitride film is formed at least on the front surface and the back surface of the crystallized glass, the stresses of the silicon nitride film at the
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